Single step electron-beam lithography archiving lift-off for T-gate in high electron mobility transistor fabrication - Concepedia

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Single step electron-beam lithography archiving lift-off for T-gate in high electron mobility transistor fabrication

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Citations

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References

2020

Year

Baoquan Sun, Peng Zhang, Teng Zhang, Shaofei Shangguan, Sheng Wu, Xiaohua Ma

Microelectronic Engineering

Electrical EngineeringEngineeringElectron-beam LithographyBeam LithographyNanoelectronicsApplied PhysicsSemiconductor Device FabricationMicroelectronicsSemiconductor Device

References

	Year	Citations

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