Fully Flexible Electromagnetic Vibration Sensors with Annular Field Confinement Origami Magnetic Membranes

Abstract

Abstract Sensing of mechanical motion based on flexible electromagnetic sensors is challenging due to the complexity of obtaining flexible magnetic membranes with confined and enhanced magnetic fields. A fully flexible electromechanical system (MEMS) sensor is developed to conduct wearable monitoring of mechanical displacement with excellent adaptability to complex surface morphology through a suspended flexible magnet enclosed within a novel setup formed by a multi‐layer flexible coil and annular origami magnetic membranes. The annular membranes not only regulate the overall distribution of the magnetic field and enhance the overall magnetism by 291%, but also greatly increase the range of the magnetic field to cover the entire region of the coil. The sensor offers a broad frequency response ranging from 1 Hz to 10 kHz and a sensitivity of 0.59 mV µm −1 at 1.7 kHz. The fully flexible format of the sensor enables various applications demonstrated by biophysical sensing, motion detection, voice recognition, and machine diagnostics through direct attachment on soft and curvilinear surfaces. Similar sensors can combine multiple sensing and energy harvesting modalities to achieve battery‐less and self‐sustainable operation, and can be deployed in large numbers to conduct distributed sensing for machine status assessment, health monitoring, rehabilitation, and speech aid.