CO<sub>2</sub>-based atomic/molecular layer deposition of lithium ethylene carbonate thin films

Juho Heiska, Milad Madadi, Maarit Karppinen

Nanoscale Advances · 2020 · 12 citations · 46 references

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Concepts

Abstract

CO<sub>2</sub>is used as a precursor in atomic/molecular layer deposition (ALD/MLD) for the fabrication of lithium ethylene carbonates, which are the organic species that naturally form in the solid electrolyte interphase of a typical lithium-ion battery.

References

46