Concepedia

Publication | Closed Access

Mechanistic insights of Sn-based non-chemically-amplified resists under EUV irradiation

DOI

25

Citations

56

References

2020

Year

Guilherme Kretzmann Belmonte, Suelen Weimer Cendron, Pulikanti Guruprasad Reddy, Cleverson A. S. Moura, Mohamad G. Moinuddin, Peter Jerome, Satinder K. Sharma, Gabriela Albara Lando, Marcelo Puiatti, Kenneth E. Gonsalves,
Applied Surface Science

References

YearCitations

Page 1