Highly hydrophobic metal–organic framework for self-protecting gate dielectrics

Arif I. Inamdar, Abhishek Pathak, Muhammad Usman, Kuan‐Ru Chiou, Pei-Hsien Tsai, Shruti Mendiratta, Saqib Kamal, Yen‐Hsiang Liu, J.W. Chen, Ming‐Hsi Chiang,

Journal of Materials Chemistry A · 2020 · 32 citations · 42 references

Concepts

Abstract

A high-<italic>κ</italic>copper-based metal–organic framework with unusual dielectric behaviour and outstanding water resistant properties was successfully designed for self-protecting microelectronic devices as gate dielectrics.

References

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