Publication | Closed Access
Investigation of coherency stress-induced phase separation in AlN/Al<sub>x</sub>Ga<sub>1−x</sub>N superlattices grown on sapphire substrates
10
Citations
32
References
2020
Year
Suppression of compositional non-uniformity in Al<sub>x</sub>Ga<sub>1−x</sub>N layers by using AlN/Al<sub>x</sub>Ga<sub>1−x</sub>N superlattices through adjusting stresses in AlN/Al<sub>x</sub>Ga<sub>1−x</sub>N layers is demonstrated.
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