Correlation between ferroelectricity and nitrogen incorporation of undoped hafnium dioxide thin films

Jun-Dao Luo, Yun-Tien Yeh, Yu‐Ying Lai, Chia-Feng Wu, Hao-Tung Chung, Yi-Shao Li, Kai-Chi Chuang, Wei-Shuo Li, Pin-Guang Chen, M. H. Lee,

Vacuum · 2020 · 10 citations · 35 references

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References

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