Publication | Closed Access
Big data analytics for cycle time related feature selection in the semiconductor wafer fabrication system
44
Citations
37
References
2020
Year
EngineeringData ScienceData MiningFeature EngineeringBig Data AnalyticsPredictive AnalyticsPredictive MaintenanceComputer EngineeringManufacturing PlanningFeature SelectionBusinessProduction EngineeringBig Data
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