Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films - Concepedia

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Impact of negative bias on the piezoelectric properties through the incidence of abnormal oriented grains in Al0.62Sc0.38N thin films

DOI Full Paper Access

21

Citations

29

References

2020

Year

C.S. Sandu, Fazel Parsapour, Dan Xiao, Robin Nigon, Lukas M. Riemer, Thomas LaGrange, Paul Muralt

Thin Solid Films

Materials ScienceAluminium NitrideAl0.62sc0.38n Thin FilmsEngineeringMaterial AnalysisApplied PhysicsPiezoelectric PropertiesPiezoelectricityPiezoelectric MaterialThin FilmsNegative Bias

References

	Year	Citations

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