Effects of the inductively coupled Ar plasma etching on the performance of (111) face CdZnTe detector

Bing Song, Jijun Zhang, Xiaoyan Liang, Shuhao Zhao, Jiahua Min, Haozhi Shi, Jianming Lai, Linjun Wang

Materials Science in Semiconductor Processing · 2020 · 10 citations · 8 references

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