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Thermoelastic Damping of Functionally Graded Material Micro-Beam Resonators Based on the Modified Couple Stress Theory

Materials ScienceEngineeringMicromechanicsMicrofabricationMechanical BehaviorMechanical EngineeringApplied PhysicsThermoelastic DampingSolid MechanicsStructural MechanicsMaterial NonlinearitiesMechanics Of MaterialsMicro-electromechanical System