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Atomic-scale study of vacancy defects in SiC affecting on removal mechanisms during nano-abrasion process

Materials EngineeringMaterials ScienceEngineeringPhysicsApplied PhysicsRemoval MechanismsCarbideVacancy DefectsAtomic-scale StudyStructural CeramicSemiconductor Device FabricationDefect FormationDefect ToleranceMicrostructure