Publication | Closed Access
Empirical modeling and Monte Carlo simulation of secondary electron yield reduction of laser drilled microporous gold surfaces
25
Citations
20
References
2019
Year
EngineeringElectron-beam LithographyElectron MicroscopySecondary Electron YieldFlat Gold SurfaceMaterials ScienceMonte-carlo ModellingPhysicsNanotechnologyMicroporous Gold SurfacesEffective SeyEmpirical ModelingMicroanalysisLaser Processing TechnologyMonte Carlo SimulationLaser-assisted DepositionMicroelectronicsSurface CharacterizationAdvanced Laser ProcessingSurface AnalysisSurface ScienceApplied PhysicsLaser-surface InteractionsSurface Processing
This work investigates secondary electron yield (SEY) mitigation from a metal surface with a microporous array fabricated using the laser drilling technique. We propose a general empirical model to fit the experimentally measured SEY of a flat gold surface for normal and oblique incidences of primary electrons. Using this empirical model, we develop a two-dimensional Monte Carlo (MC) simulation scheme to determine the effective SEY of a microporous array. It is found that the SEY from a porous surface is significantly reduced compared to that of the flat surface. By taking into account all the generations of secondary electrons inside a well, our MC results are found to be in very good agreement with the experimental data. The dependence of the SEY on the aspect ratio of the micropores and porosity of the surface is examined. A simple empirical formula has been proposed to evaluate the effective SEY of the gold microporous array for pores of arbitrary aspect ratios.
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