High Frequency Piezoelectric Micromachined Transducers with Wide Bandwidth and High Sensitivity

Abstract

Recent advances in microfabrication and piezoelectric thin film deposition have made possible the fabrication of micromachined ultrasound transducers that can compete in performance with the traditional bulk piezoelectric transducers. In this paper we report a piezoelectric micromachined transducer (PMUT) with 128 elements, a center frequency of 12MHz, a bandwidth of 105% and a sensitivity of -56dB at 15 mm from transducer. Design, characterization, matching circuit and ultrasound images acquired with the PMUT device are described in this work.