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Potassium tartrate as a complexing agent for chemical mechanical polishing of Cu/Co/TaN barrier liner stack in H2O2 based alkaline slurries

Materials ScienceMaterials EngineeringChemical EngineeringEngineeringMaterial ProcessingCorrosionAlkaline SlurriesPotassium TartrateSurface TreatmentChemistryChemical Mechanical PolishingSurface ProcessingMaterial Preparation