Packaged microbubble resonator optofluidic flow rate sensor based on Bernoulli Effect

Abstract

A novel flow sensor based on dynamic fluid pressure changing in a packaged microbubble resonator without additional modification on its structure has been proposed and experimentally demonstrated. The results of sensing performance under both tunable laser source and broadband light source are presented. The flow rate sensitivity can reach up to 0.0196 pm / (µL/min). The fluid pressure variation caused by Bernoulli Effect is also analyzed theoretically.