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Interface dynamics in ohmic contact optimization on AlGaN/GaN heterostructure by the formation of TiN

Materials ScienceWide-bandgap SemiconductorElectrical EngineeringAluminium NitrideEngineeringNanoelectronicsSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceAlgan/gan HeterostructureInterface DynamicsMicroelectronicsOhmic Contact OptimizationCategoryiii-v Semiconductor