APL Photonics · 2019 · 177 citations · 31 references
EngineeringElectrical EngineeringMicrofabricationOptoelectronicsPhotonicsIntegrated Circuit FabricationIntegrated OpticsIntegrated PhotonicsPhotodetectorsPhotonic Integrated CircuitsSilicon PhotonicsElastomeric Stamp FabricationIntegrated Photonic DevicesIntegration Of Iii-v MaterialsPhotodiodesSilicon PhotodiodesSilicon Photonics Integration
Silicon photonics offers compact, high‑performance PICs with diverse optical functions, yet laser source integration remains immature, limiting cost reduction and broader application. This paper explores micro‑transfer‑printing as a promising method for integrating III‑V devices onto silicon photonic circuits. Micro‑transfer‑printing uses a PDMS elastomeric stamp to mass‑parallelly integrate III‑V devices onto silicon wafers with minimal process alteration, substantially lowering fabrication costs.
Silicon photonics (SiPh) enables compact photonic integrated circuits (PICs), showing superior performance for a wide variety of applications. Various optical functions have been demonstrated on this platform that allows for complex and powerful PICs. Nevertheless, laser source integration technologies are not yet as mature, hampering the further cost reduction of the eventual Si photonic systems-on-chip and impeding the expansion of this platform to a broader range of applications. Here, we discuss a promising technology, micro-transfer-printing (μTP), for the realization of III-V-on-Si PICs. By employing a polydimethylsiloxane elastomeric stamp, the integration of III-V devices can be realized in a massively parallel manner on a wafer without substantial modifications to the SiPh process flow, leading to a significant cost reduction of the resulting III-V-on-Si PICs. This paper summarizes some of the recent developments in the use of μTP technology for realizing the integration of III-V photodiodes and lasers on Si PICs.
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Transfer printing by kinetic control of adhesion to an elastomeric stamp
Matthew Meitl, Zhengtao Zhu, Vipan Kumar et al. · Nature Materials · 2005 · 1.5K citations
Competing Fracture in Kinetically Controlled Transfer Printing
Xue Feng, Matthew Meitl, Audrey M. Bowen et al. · Langmuir · 2007 · 398 citations
Natural Sciences, Materials Engineering, Materials Science +17