Publication | Closed Access

On the passivation mechanism of poly-silicon and thin silicon oxide on crystal silicon wafers

Electrical EngineeringWafer Scale ProcessingEngineeringMicrofabricationNanoelectronicsSilicon DebuggingPassivation MechanismApplied PhysicsThin Silicon OxideSemiconductor Device FabricationCrystal Silicon WafersSilicon On InsulatorSemiconductor Device