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Enhancing out-of-plane stroke in piezoelectrically driven micro-lens actuator with residual stress control

EngineeringSoft RoboticsMicrofabricationMechanicsMechanical EngineeringMechatronicsMechanical SystemsResidual Stress ControlMicro-lens ActuatorActuationPiezoelectricityMicroactuatorMicropositioningMicro-optical ComponentOut-of-plane Stroke