Effects of working pressure on structure and properties of Al-containing amorphous carbon films prepared by high-power impulse magnetron sputtering

Ya-Li Peng, Chao-Qian Guo, Songsheng Lin, Qian Shi, Chunbei Wei, Yifan Su, Yiqian Wu, Peng Tang, Xia-Gao Zhu, Mingjiang Dai

Journal of Alloys and Compounds · 2019 · 16 citations · 61 references

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