Ultra-Large-Coupling and Spurious-Free SH₀ Plate Acoustic Wave Resonators Based on Thin LiNbO₃

Abstract

This study lays a foundation for the design of the SH <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</sub> plate acoustic wave (PAW) resonators based on LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> plate, and are applicable to the ultra-wideband filters and next-generation tunable filters. The coupling coefficient (k <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) of SH <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</sub> mode is optimized to as high as 55% and wideband spurious are well controlled by analyzing the propagation characteristics of plate modes in LiNbO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> . The SH <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">0</sub> mode is demonstrated to be slowly dispersive and features the superiority of interdigital transducer (IDT)-defining frequency over most other plate modes. On the device level, the transducer types and electrode materials are investigated and compared. In addition, for edge-reflected SH0 resonators, stopband dispersion analysis is provided and the longitudinal ripples are suppressed. For edge-reflected SH0 resonators, a novel perfect edge reflector is proposed with elimination of longitudinal spurious ripples.