Publication | Closed Access
Achieving on chip micro-supercapacitors based on CrN deposited by bipolar magnetron sputtering at glancing angle
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Citations
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References
2019
Year
Materials ScienceElectrical EngineeringSupercapacitorsEngineeringHybrid CapacitorMicrofabricationApplied PhysicsChip Micro-supercapacitorsSupercapacitorBipolar MagnetronMicroelectronicsElectrochemical Double Layer Capacitor
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