Publication | Open Access
Status of the silicon pore optics technology
12
Citations
2
References
2019
Year
Unknown Venue
Optical MaterialsX-ray SpectroscopyEngineeringSilicon On InsulatorX-ray FluorescenceMaterials ScienceMaterials EngineeringSemiconductor Device FabricationSynchrotron RadiationMicroelectronicsMicrostructureSilicon Pore OpticsMicrofabricationX-ray DiffractionApplied PhysicsVersatile TechnologyPorosityMass Production CapabilitiesOptoelectronicsX-ray Optic
Silicon Pore Optics (SPO) uses commercially available monocrystalline double-sided super-polished silicon wafers as a basis to produce mirrors that form lightweight and stiff high-resolution x-ray optics. The technology has been invented by cosine and the European Space Agency (ESA) and developed together with scientific and industrial partners to mass production levels. SPO is an enabling element for large space-based x-ray telescopes such as Athena and ARCUS, operating in the 0.2 to 12 keV band, with angular resolution requirements up to 5 arc seconds. SPO has also shown to be a versatile technology that can be further developed for gamma-ray optics, medical applications and for material research. This paper will summarise the status of the technology and of the mass production capabilities, show latest performance results and discuss the next steps in the development.
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