Enhancing Parametric Sensitivity Using Micro-Lever Coupler in Mechanical Coupling Mode-Localized Mems Accelerometer

Abstract

This paper reports a mode-localized resonant accelerometer (ML-RXL) with novel designed micro-lever mechanical coupler to significantly enhance its parametric sensitivity. The experiment results demonstrate the sensitivity of prototype is 32.49 AR/g in the linear operating region of 0.37g, which is one order of magnitude higher than prior work [1] and paves the way for ML-RXL to achieve the sub-μg resolution.