Fluid Density Sensing Using Piezoelectric Micromachined Ultrasound Transducers

Abstract

We report on the suitability of a Piezoelectric Micromachined Ultrasound Transducer (PMUT) based system for fluid density measurement in both static and dynamic conditions. We exploit the well-known phenomenon of the virtual added mass induced changes in the resonant frequency of a structure vibrating in a fluid medium to design, fabricate and test a unique PMUT-fluid-PMUT (PFP) system as a fluid density sensor. The proposed system uses through-transmission of ultrasound waves from one PMUT transducer to another identical transducer with the test fluid in between and records the shift in the resonant peak of the receiver PMUT. We also study the sensitivity of the system using different sized PMUTs with resonant frequencies ranging from 140 kHz to 1.8 MHz and show how the system can be designed for a desired sensitivity. Further, we carry out experiments with dynamic density changes by mixing fluids to study how the system could be used to track changes in the density of a flowing liquid in real-time. We also study the effect of the distance separating the transmitter and the receiver to establish the utility of the system in both micro and macro scales in static as well as dynamic conditions.