Characterization and optimization of low-energy broad-beam ion source

Abstract

In this work, a cold-cathode ion source was modified to produce a broad beam that could be successfully used in a variety of applications. The ion source features gave reliable, long-term, maintenance-free operation. The ion source was surrounded by a magnetic field to produce uniform plasma in limited volume at low gas pressures (10 −3 torr). The output ion beam current was up to 700 μA, and the diameter of the cold cathode was broad (∼25 mm). The stainless steel cathode disk and the cylindrical anode were separated by a Teflon flange. The fabrication of the source was simple, and a stable discharge medium was obtained by adjusting the operating conditions, such as discharge voltage, magnetic field intensity and argon (Ar) gas pressure. Also, the output ion beam was measured at different acceleration voltages. Moreover, the ion beam profile is characterized at different magnetic field intensities.