Study of sheath properties in collisional plasma consisting of non-extensive electrons and thermal ions

Possible generalization of Boltzmann-Gibbs statistics

Constantino Tsallis · Journal of Statistical Physics · 1988 · 9.6K citations

Natural Sciences, Physics, Probability Theory +13

Measurement of electron energy distribution in low-pressure RF discharges

Valery Godyak, R. B. Piejak, B. M. Alexandrovich · Plasma Sources Science and Technology · 1992 · 759 citations

Natural Sciences, Electrical Engineering, Microelectronics +15

Ion-acoustic solitary waves in a plasma with a q-nonextensive electron velocity distribution

Mouloud Tribeche, Lyes Djebarni, Rabia Amour · Physics of Plasmas · 2010 · 225 citations

Natural Sciences, Physics, Acoustics +11

Electrostatic trapping as a key to the dynamics of plasmas, fluids and other collective systems

Alejandro Luque, H. Schamel · Physics Reports · 2005 · 113 citations

Natural Sciences, Physics, Electromagnetism +13

Plasma immersion ion implantation for semiconductor processing

N.W. Cheung · Materials Chemistry and Physics · 1996 · 57 citations

Natural Sciences, Materials Science, Physics +13