Publication | Closed Access
Bonding structure and etching characteristics of amorphous carbon for a hardmask deposited by DC sputtering
23
Citations
38
References
2019
Year
Materials ScienceMaterials EngineeringAmorphous CarbonDiamond-like CarbonEngineeringGlassy CarbonCarbon-based MaterialNanoelectronicsApplied PhysicsBonding StructureAmorphous SolidMicroelectronicsPlasma Etching
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