Publication | Closed Access
Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals
31
Citations
35
References
2019
Year
Electrical EngineeringPiezoelectric Mems ResonatorEngineeringFrame StructureMicrofabricationPiezoelectric NanogeneratorsQuality Factor ImprovementPiezoelectricityPiezoelectric MaterialMicroelectronicsMicro-electromechanical System
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