2016 · 66 citations · 0 references
EngineeringElectrical EngineeringMechanical EngineeringElectrochemistryMicroelectromechanical SystemsSensorsElectromechanical Energy ConversionElectrostatic ActuationElectrostatic ActuatorsMems DesignMems Energy HarvestingMems SensorsCapacitive CouplingCapacitive TransductionElectrostatic Energy HarvestingEnergy HarvestingEnergy Harvesting SystemsMass-spring SystemPiezoelectric EffectTransduction
International audience