Publication | Closed Access
The impact of thermal annealing on the temperature dependent resistance behavior of Pt thin films sputtered on Si and Al2O3 substrates
22
Citations
15
References
2019
Year
Materials ScienceMaterials EngineeringEpitaxial GrowthEngineeringSurface ScienceApplied PhysicsAl2o3 SubstratesSemiconductor MaterialPt Thin FilmsThin FilmsMicroelectronicsChemical Vapor DepositionThin Film Processing
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