Publication | Closed Access
Second use or recycling of hydrogen waste gas from the semiconductor industry - Economic analysis and technical demonstration of possible pathways
23
Citations
8
References
2019
Year
Chemical EngineeringHydrogen ProductionEngineeringEnvironmental EngineeringHydrogen TransportEconomic AnalysisWaste ManagementRecyclingLife Cycle AssessmentHydrogen UtilizationHydrogen Production TechnologyHydrogenHydrogen Waste GasSustainable ProductionSemiconductor Industry
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