Multimodal Sensing with a Three-Dimensional Piezoresistive Structure

TLDR

Sensors that mimic cutaneous receptors have potential for artificial systems interacting with the environment, and multimodal responses with high sensitivity and wide dynamic range are essential for such applications. This study presents a simple 3‑D MEMS sensor that uses monocrystalline silicon nanomembranes as piezoresistive elements to separately and simultaneously measure normal force, shear force, bending, and temperature. The sensor is fabricated and assembled into scalable arrays capable of spatiotemporal mapping, and integrated with wireless data‑recording and transmission electronics for use with standard consumer devices. Simulations confirm that the sensor delivers high‑sensitivity measurements with millisecond response times.

Abstract

Sensors that reproduce the complex characteristics of cutaneous receptors in the skin have important potential in the context of artificial systems for controlled interactions with the physical environment. Multimodal responses with high sensitivity and wide dynamic range are essential for many such applications. This report introduces a simple, three-dimensional type of microelectromechanical sensor that incorporates monocrystalline silicon nanomembranes as piezoresistive elements in a configuration that enables separate, simultaneous measurements of multiple mechanical stimuli, such as normal force, shear force, and bending, along with temperature. The technology provides high sensitivity measurements with millisecond response times, as supported by quantitative simulations. The fabrication and assembly processes allow scalable production of interconnected arrays of such devices with capabilities in spatiotemporal mapping. Integration with wireless data recording and transmission electronics allows operation with standard consumer devices.