Structure and thermochromic properties of Mo-doped VO₂ thin films deposited by sol–gel method

Abstract

Thermochromic VO2 thin films were prepared on quartz substrates with sol–gel method. After the Vanadium oxide films were annealed at 550 °C for 4 h in a tube furnace within a nitrogen atmosphere, Mo6+-doped VO2 films were obtained. As the concentration of Mo6+ increased, the primary diffraction peaks shifted slightly toward the small angle, and the VO2 grains became larger and larger. The XPS demonstrated that the valence of vanadium was mainly +4 and molybdenum was mainly +6. Finally, it is found that the effect of Mo6+ doping decreases Tc by approximately 5 °C per 1 at. % on average.