Publication | Closed Access
Fabrication of highly sensitive capacitive pressure sensors with porous PDMS dielectric layer via microwave treatment
49
Citations
28
References
2019
Year
Materials ScienceElectrical EngineeringMicrowave TreatmentEngineeringMicrofabricationNano Electro Mechanical SystemSensor DesignPorous SensorSensor TechnologyMicro-electromechanical System
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