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Edge chipping minimisation strategy for milling of monocrystalline silicon: A molecular dynamics study

Materials EngineeringMaterials ScienceWafer Scale ProcessingEngineeringMicrofabricationMaterial MachiningMechanical EngineeringApplied PhysicsNanoscale ModelingMinimisation StrategySemiconductor Device FabricationMonocrystalline SiliconMicroelectronicsMolecular Dynamics StudySilicon On InsulatorMicrostructure