Publication | Closed Access
Stress compensated MEMS magnetic actuator based on magnetostrictive Fe65Co35 thin films
26
Citations
18
References
2019
Year
Materials ScienceMagnetismEngineeringMicrofabricationMems Magnetic ActuatorMicroactuatorMagnetic Thin FilmsMagnetic DeviceMicroelectronicsMagnetic MaterialMicro-electromechanical System
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