Molecular dynamics simulation of SiC removal mechanism in a fixed abrasive polishing process

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Modeling solid-state chemistry: Interatomic potentials for multicomponent systems

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Extracting dislocations and non-dislocation crystal defects from atomistic simulation data

Alexander Stukowski, Karsten Albe · Modelling and Simulation in Materials Science and Engineering · 2010 · 1.3K citations

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Analytical potential for atomistic simulations of silicon, carbon, and silicon carbide

Paul Erhart, Karsten Albe · Physical Review B · 2005 · 674 citations

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Material removal mechanism in chemical mechanical polishing: theory and modeling

Jianfeng Luo, David Dornfeld · IEEE Transactions on Semiconductor Manufacturing · 2001 · 641 citations

Engineering, Materials Engineering, Materials Science +16