Transparent capacitive micromachined ultrasonic transducers (CMUTs) for photoacoustic applications

Abstract

Integration of acoustic and optical techniques prompted the need for transparent ultrasonic transducers to guide the light through the transducer and improve the signal to noise ratio. In the presented paper, capacitive micromachined ultrasound transducers (CMUTs) using glass substrate and indium-tin-oxide electrodes were fabricated by adhesive wafer bonding technique presenting a transparency of up to 82% in the visible range. A receive sensitivity of 65.5 μV/Pa was measured with noise equivalent sensitivity of 95 Pa. Capacity of the produced CMUTs for photoacoustic imaging was also demonstrated by successfully detecting the photoacoustic signal from an aluminum foil target, which was irradiated by a 532-nm pulse laser transmitted through the CMUT. The centre frequency of the detected photoacoustic signal was at 2 MHz with 52.3% -6-dB fractional bandwidth.