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Development of a Three-Dimensional Ultrasonic Elliptical Vibration Transducer (3D-UEVT) Based on Sandwiched Piezoelectric Actuator for Micro-grooving

EngineeringSoft RoboticsMicrofabricationPiezoelectric NanogeneratorsMechanical EngineeringMechatronicsTransducer PrincipleSandwiched Piezoelectric ActuatorPiezoelectricityPiezoelectric MaterialUltrasoundVibration ControlMicromachined Ultrasonic Transducer