Applied Physics A · 2019 · 13 citations · 29 references
EngineeringManufacturing EngineeringMaterials ScienceMicrofabricationNanotechnologyOpticsDevice ScalingIntegrated OpticsLaser Material ProcessingLaser OpticsMask FabricationBeam ShapingInterference LithographyLaser Beam ShapingLaser MicromachiningNanopatterningOptical Beam ShapingOptical Lithography
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