Publication | Closed Access
Chemical and structural characterization of tungsten nitride (WNx) thin films synthesized via Gas Injection Magnetron Sputtering technique
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Citations
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References
2019
Year
Materials EngineeringMaterials ScienceChemical EngineeringStructural CharacterizationEngineeringBoron NitrideSurface ScienceApplied PhysicsThin FilmsChemical Vapor DepositionTungsten Nitride
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