Concepedia

Chemical and structural characterization of tungsten nitride (WNx) thin films synthesized via Gas Injection Magnetron Sputtering technique

Bartosz Wicher, Rafał Choduń, Katarzyna Nowakowska‐Langier, Marek Trzciński, Sebastian Okrasa, R. Minikayev, M.K. Naparty, Krzysztof Zdunek

Vacuum · 2019 · 40 citations · 45 references

DOI

Concepts

References

45

Microstructural evolution during film growth

I. Petrov, P.B. Barna, Lars Hultman et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 1.7K citations

, , +17

Industrial applications of superhard nanocomposite coatings

S. Vepřek, Maritza G. J. Vepřek-Heijman · Surface and Coatings Technology · 2008 · 416 citations

, , +14

Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN

W. Spengler, R. Kaiser, A. Nørlund Christensen et al. · Physical review. B, Condensed matter · 1978 · 270 citations

, , +17

Structural and mechanical properties of chromium nitride, molybdenum nitride, and tungsten nitride thin films

P. Hones, Nicolas Martin, M. Regula et al. · Journal of Physics D Applied Physics · 2003 · 173 citations

, , +17

Examining the Performance of Refractory Conductive Ceramics as Plasmonic Materials: A Theoretical Approach

Mukesh Kumar, Naoto Umezawa, Satoshi Ishii et al. · ACS Photonics · 2015 · 163 citations · Full text

, , +17