Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators - Concepedia

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Rapid and low power laser actuation of sputter-deposited NiTi shape memory alloy (SMA) MEMS thermal bimorph actuators

58

Citations

36

References

2019

Year

Cory R. Knick, Gabriel L. Smith, Christopher Morris, Hugh A. Bruck

Sensors and Actuators A Physical

Materials ScienceAdvanced Laser ProcessingEngineeringMicrofabricationMechanical EngineeringApplied PhysicsActuationMicroactuatorLaser-assisted DepositionMicro-electromechanical SystemMicroelectronicsMicrostructure

References

	Year	Citations

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