Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 153 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceSurface ChemistrySurface EngineeringSurface ScienceCoatingsPlasma-surface InteractionsSurface CoatingsSurface ModificationSurface PhysicsSurface TreatmentIon Beam Surface TreatmentIon-surface InteractionsPlasma-induced Surface DamageRadiation-induced Surface EffectsSurface Sputtering