Characterization of Single- and Multiple-Layer Films by X-Ray Reflectometry

Abstract

Abstract Precision X-ray reflectivity data were obtained with a high-resolution reflectometer equipped with a rotating anode X-ray source and Ge 220 channel monochromators (one placed before and the other after the specimen). The surfaces and buried interfaces of thin films were characterized by ieast-squares refinement of experimental data. Values of thickness, density, and/or roughness of Pt “single-layer” and Pt/Co based multiple-layer films were determined.