Publication | Closed Access
Parameter optimization in femtosecond pulsed laser etching of fluorine-doped tin oxide films
28
Citations
34
References
2019
Year
Materials ScienceAdvanced Laser ProcessingEngineeringFluorine-doped TinOptical PropertiesApplied PhysicsLaser Processing TechnologyLaser-assisted DepositionPulsed Laser DepositionPlasma EtchingOptoelectronicsParameter Optimization
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