A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers - Concepedia

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A one-step residue-free wet etching process of ceramic PZT for piezoelectric transducers

DOI Full Paper Access

38

Citations

28

References

2019

Year

Haoran Wang, Manish Godara, Chen Zhenfang, Huikai Xie

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringEngineeringPiezoelectric TransducersMicrofabricationTransducer PrincipleCeramic PztPiezoelectricityPiezoelectric MaterialUltrasoundOne-step Residue-free WetMicromachined Ultrasonic Transducer

References

	Year	Citations

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