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Non-polar GaN thin films deposition on glass substrate at low temperatures by conventional RF sputtering

Materials ScienceWide-bandgap SemiconductorElectrical EngineeringLow TemperaturesEngineeringApplied PhysicsAluminum Gallium NitrideConventional Rf SputteringGlass SubstrateGan Power DeviceThin FilmsCategoryiii-v SemiconductorOptoelectronics