Lithography Compatible, Flexible Micro‐Organic Light‐Emitting Diodes by Template‐Directed Growth

Abstract

Abstract In this work, high‐resolution flexible micro‐organic light‐emitting diodes (micro‐OLEDs) are presented by template‐directed growth. The templates are prepared by parallel patterning techniques (nanotransfer printing and photolithography) to create prepatterns on flexible substrates. The prepatterns act as nucleation sites and induce area‐selective growth of organic semiconductor molecules upon deposition. By optimization of growth parameters such as substrate temperature and growth rate, uniform patterns of diverse light‐emitting materials can be realized with feature sizes down to hundreds of nanometers, including orange, blue, and green emissions on the flexible substrates. Flexible micro‐OLEDs are further demonstrated based on the patterned organic semiconductors. By combination of parallel patterning techniques, this work provides a high yield and resolution patterning way for flexible organic electronics over large areas.